A nanogap electrode platform for organic monolayer-film devices

Simon Pfaehler, Kevin Keim, Reka Csiki, Quoc Hung Nguyen, Kung Ching Liao, Martin Stutzmann, Jeffrey Schwartz, Anna Cattani-Scholz, Marc Tornow

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

The fabrication and electrical characterization of organic monolayer functionalized, planar silicon nanogap electrode devices is described. Highly doped silicon nanogap electrodes were fabricated with contact separation as small as 200 nm by anisotropic etching of silicon-on-insulator (SOI) substrates using KOH and a patterned metal film as the etch mask. Conductance was greatly improved compared to an untreated device by self-assembly of a monolayer of an aromatic organophosphonate in the nanogap. This device is a prototype for development of self-assembled monolayer-functionalized field-effect transistors involving all-silicon contact electrodes.

Original languageEnglish (US)
Title of host publication16th International Conference on Nanotechnology - IEEE NANO 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages842-844
Number of pages3
ISBN (Electronic)9781509039142
DOIs
StatePublished - Nov 21 2016
Event16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan
Duration: Aug 22 2016Aug 25 2016

Publication series

Name16th International Conference on Nanotechnology - IEEE NANO 2016

Other

Other16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
CountryJapan
CitySendai
Period8/22/168/25/16

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

Fingerprint Dive into the research topics of 'A nanogap electrode platform for organic monolayer-film devices'. Together they form a unique fingerprint.

  • Cite this

    Pfaehler, S., Keim, K., Csiki, R., Nguyen, Q. H., Liao, K. C., Stutzmann, M., Schwartz, J., Cattani-Scholz, A., & Tornow, M. (2016). A nanogap electrode platform for organic monolayer-film devices. In 16th International Conference on Nanotechnology - IEEE NANO 2016 (pp. 842-844). [7751507] (16th International Conference on Nanotechnology - IEEE NANO 2016). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NANO.2016.7751507