A Fully Integrated CMOS-controlled Scalable Microfluidics and Pneumatic-free Cell Actuation and Cytometry Sensing Device

Moore's law has enabled massive scaling of complex computing and sensing systems in modern-day chip-scale architectures allowing extremely high yield and system complexity at very low-cost. Exploiting such Moore's law, we explore silicon-based integrated circuits and chip-scale systems to interface with biological fluids to manipulate, sense, and detect cells in real-time for an end-to-end low cost, miniaturized, and high sensitivity point-of-care diagnostics platform. Elimi-nating the need for complex, expensive, large and bulky syringe pumps and optical-based cytometers, the proposed system allows pneumatic-free AC electro-osmosis bulk fluid driving capabilities controlled by the CMOS chip, and integrated dielectrophoretic cell actuation with 2μ m focusing accuracy, impedance spectroscopy sensing, and separation capabilities. The paper presents, for the first-time, a CMOS-driven cellular sensing platform for microfluidics that can be translated to a wide range of biomedical applications.