Abstract
We studied the effects of heavy doping and Ge concentration in the base on the dc performance of Si/Si1-xGex/Si npn HBT's. The lateral drift mobility of holes in heavily doped epitaxial SiGe bases is found to be lower than bulk Si values and independent of Ge content, and the Hall scattering factor is less than unity and decreases with increasing Ge concentration. For the vertical electron transport we have observed bandgap narrowing due to heavy base doping which is, to first order, independent of Ge concentration. Finally, a model for the collector current enhancement with respect to Si devices, including the effects of reduced density of states in the strained Si1 - xGex base and the effective bandgap due to Ge and heavy doping, is presented.
Original language | English (US) |
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Pages (from-to) | 87-90 |
Number of pages | 4 |
Journal | Technical Digest - International Electron Devices Meeting, IEDM |
State | Published - 1993 |
Event | Proceedings of the 1993 IEEE International Electron Devices Meeting - Washington, DC, USA Duration: Dec 5 1993 → Dec 8 1993 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry