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A cleanroom in a glovebox

  • Mason J. Gray
  • , Narendra Kumar
  • , Ryan O'Connor
  • , Marcel Hoek
  • , Erin Sheridan
  • , Meaghan C. Doyle
  • , Marisa L. Romanelli
  • , Gavin B. Osterhoudt
  • , Yiping Wang
  • , Vincent Plisson
  • , Shiming Lei
  • , Ruidan Zhong
  • , Bryan Rachmilowitz
  • , He Zhao
  • , Hikari Kitadai
  • , Steven Shepard
  • , Leslie M. Schoop
  • , G. D. Gu
  • , Ilija Zeljkovic
  • , Xi Ling
  • Kenneth S. Burch

Research output: Contribution to journalArticlepeer-review

Abstract

The exploration of new materials, novel quantum phases, and devices requires ways to prepare cleaner samples with smaller feature sizes. Initially, this meant the use of a cleanroom that limits the amount and size of dust particles. However, many materials are highly sensitive to oxygen and water in the air. Furthermore, the ever-increasing demand for a quantum workforce, trained and able to use the equipment for creating and characterizing materials, calls for a dramatic reduction in the cost to create and operate such facilities. To this end, we present our cleanroom-in-a-glovebox, a system that allows for the fabrication and characterization of devices in an inert argon atmosphere. We demonstrate the ability to perform a wide range of characterization as well as fabrication steps, without the need for a dedicated room, all in an argon environment. Finally, we discuss the custom-built antechamber attached to the back of the glovebox. This antechamber allows the glovebox to interface with ultra-high vacuum equipment such as molecular-beam epitaxy and scanning tunneling microscopy.

Original languageEnglish (US)
Article number6462
JournalReview of Scientific Instruments
Volume91
Issue number7
DOIs
StatePublished - Jul 1 2020

All Science Journal Classification (ASJC) codes

  • Instrumentation

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