TY - JOUR
T1 - A cleanroom in a glovebox
AU - Gray, Mason J.
AU - Kumar, Narendra
AU - O'Connor, Ryan
AU - Hoek, Marcel
AU - Sheridan, Erin
AU - Doyle, Meaghan C.
AU - Romanelli, Marisa L.
AU - Osterhoudt, Gavin B.
AU - Wang, Yiping
AU - Plisson, Vincent
AU - Lei, Shiming
AU - Zhong, Ruidan
AU - Rachmilowitz, Bryan
AU - Zhao, He
AU - Kitadai, Hikari
AU - Shepard, Steven
AU - Schoop, Leslie M.
AU - Gu, G. D.
AU - Zeljkovic, Ilija
AU - Ling, Xi
AU - Burch, Kenneth S.
N1 - Publisher Copyright:
© 2020 Author(s).
PY - 2020/7/1
Y1 - 2020/7/1
N2 - The exploration of new materials, novel quantum phases, and devices requires ways to prepare cleaner samples with smaller feature sizes. Initially, this meant the use of a cleanroom that limits the amount and size of dust particles. However, many materials are highly sensitive to oxygen and water in the air. Furthermore, the ever-increasing demand for a quantum workforce, trained and able to use the equipment for creating and characterizing materials, calls for a dramatic reduction in the cost to create and operate such facilities. To this end, we present our cleanroom-in-a-glovebox, a system that allows for the fabrication and characterization of devices in an inert argon atmosphere. We demonstrate the ability to perform a wide range of characterization as well as fabrication steps, without the need for a dedicated room, all in an argon environment. Finally, we discuss the custom-built antechamber attached to the back of the glovebox. This antechamber allows the glovebox to interface with ultra-high vacuum equipment such as molecular-beam epitaxy and scanning tunneling microscopy.
AB - The exploration of new materials, novel quantum phases, and devices requires ways to prepare cleaner samples with smaller feature sizes. Initially, this meant the use of a cleanroom that limits the amount and size of dust particles. However, many materials are highly sensitive to oxygen and water in the air. Furthermore, the ever-increasing demand for a quantum workforce, trained and able to use the equipment for creating and characterizing materials, calls for a dramatic reduction in the cost to create and operate such facilities. To this end, we present our cleanroom-in-a-glovebox, a system that allows for the fabrication and characterization of devices in an inert argon atmosphere. We demonstrate the ability to perform a wide range of characterization as well as fabrication steps, without the need for a dedicated room, all in an argon environment. Finally, we discuss the custom-built antechamber attached to the back of the glovebox. This antechamber allows the glovebox to interface with ultra-high vacuum equipment such as molecular-beam epitaxy and scanning tunneling microscopy.
UR - http://www.scopus.com/inward/record.url?scp=85089130955&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85089130955&partnerID=8YFLogxK
U2 - 10.1063/5.0006462
DO - 10.1063/5.0006462
M3 - Article
C2 - 32752826
AN - SCOPUS:85089130955
SN - 0034-6748
VL - 91
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
IS - 7
M1 - 6462
ER -