TY - JOUR
T1 - A cleanroom in a glovebox
AU - Gray, Mason J.
AU - Kumar, Narendra
AU - O'Connor, Ryan
AU - Hoek, Marcel
AU - Sheridan, Erin
AU - Doyle, Meaghan C.
AU - Romanelli, Marisa L.
AU - Osterhoudt, Gavin B.
AU - Wang, Yiping
AU - Plisson, Vincent
AU - Lei, Shiming
AU - Zhong, Ruidan
AU - Rachmilowitz, Bryan
AU - Zhao, He
AU - Kitadai, Hikari
AU - Shepard, Steven
AU - Schoop, Leslie M.
AU - Gu, G. D.
AU - Zeljkovic, Ilija
AU - Ling, Xi
AU - Burch, Kenneth S.
N1 - Funding Information:
The authors are especially grateful to T. Ezell from Witec Instruments, Matt Woods from Angstrom Instruments Inc., Jake DeGrave, and Bobby Riviere for assistance in designing and implementing various components. The authors are grateful to Paige Kelley-Lampen, David Mandrus, and Stephen E. Nagler for providing the RuCl3 sample. M.J.G., G.B.O., V.P., and K.S.B. acknowledge the primary support from the US Department of Energy (DOE), Office of Science, Office of Basic Energy Sciences under Award No. DE-SC0018675. Y.W. acknowledges the support from the National Science Foundation, Award No. DMR-1709987, while R.O’C, M.C.D., and M.L.R. were supported by Grant No. BIO-1560200. X.L. acknowledges the support from the Boston University. I.Z., B.R., and H.Z. gratefully acknowledges the support from the National Science Foundation, Grant No. NSF-DMR-1654041. Work at BNL is supported by the Office of Science, U.S. Department of Energy under Contract No. de-sc0012704. This research is funded in part by the Gordon and Betty Moore Foundation through Grant No. GBMF9064 to L.M.S.
Publisher Copyright:
© 2020 Author(s).
PY - 2020/7/1
Y1 - 2020/7/1
N2 - The exploration of new materials, novel quantum phases, and devices requires ways to prepare cleaner samples with smaller feature sizes. Initially, this meant the use of a cleanroom that limits the amount and size of dust particles. However, many materials are highly sensitive to oxygen and water in the air. Furthermore, the ever-increasing demand for a quantum workforce, trained and able to use the equipment for creating and characterizing materials, calls for a dramatic reduction in the cost to create and operate such facilities. To this end, we present our cleanroom-in-a-glovebox, a system that allows for the fabrication and characterization of devices in an inert argon atmosphere. We demonstrate the ability to perform a wide range of characterization as well as fabrication steps, without the need for a dedicated room, all in an argon environment. Finally, we discuss the custom-built antechamber attached to the back of the glovebox. This antechamber allows the glovebox to interface with ultra-high vacuum equipment such as molecular-beam epitaxy and scanning tunneling microscopy.
AB - The exploration of new materials, novel quantum phases, and devices requires ways to prepare cleaner samples with smaller feature sizes. Initially, this meant the use of a cleanroom that limits the amount and size of dust particles. However, many materials are highly sensitive to oxygen and water in the air. Furthermore, the ever-increasing demand for a quantum workforce, trained and able to use the equipment for creating and characterizing materials, calls for a dramatic reduction in the cost to create and operate such facilities. To this end, we present our cleanroom-in-a-glovebox, a system that allows for the fabrication and characterization of devices in an inert argon atmosphere. We demonstrate the ability to perform a wide range of characterization as well as fabrication steps, without the need for a dedicated room, all in an argon environment. Finally, we discuss the custom-built antechamber attached to the back of the glovebox. This antechamber allows the glovebox to interface with ultra-high vacuum equipment such as molecular-beam epitaxy and scanning tunneling microscopy.
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U2 - 10.1063/5.0006462
DO - 10.1063/5.0006462
M3 - Article
C2 - 32752826
AN - SCOPUS:85089130955
SN - 0034-6748
VL - 91
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
IS - 7
M1 - 6462
ER -