A cleanroom in a glovebox

Mason J. Gray, Narendra Kumar, Ryan O'Connor, Marcel Hoek, Erin Sheridan, Meaghan C. Doyle, Marisa L. Romanelli, Gavin B. Osterhoudt, Yiping Wang, Vincent Plisson, Shiming Lei, Ruidan Zhong, Bryan Rachmilowitz, He Zhao, Hikari Kitadai, Steven Shepard, Leslie M. Schoop, G. D. Gu, Ilija Zeljkovic, Xi LingKenneth S. Burch

Research output: Contribution to journalArticle

Abstract

The exploration of new materials, novel quantum phases, and devices requires ways to prepare cleaner samples with smaller feature sizes. Initially, this meant the use of a cleanroom that limits the amount and size of dust particles. However, many materials are highly sensitive to oxygen and water in the air. Furthermore, the ever-increasing demand for a quantum workforce, trained and able to use the equipment for creating and characterizing materials, calls for a dramatic reduction in the cost to create and operate such facilities. To this end, we present our cleanroom-in-a-glovebox, a system that allows for the fabrication and characterization of devices in an inert argon atmosphere. We demonstrate the ability to perform a wide range of characterization as well as fabrication steps, without the need for a dedicated room, all in an argon environment. Finally, we discuss the custom-built antechamber attached to the back of the glovebox. This antechamber allows the glovebox to interface with ultra-high vacuum equipment such as molecular-beam epitaxy and scanning tunneling microscopy.

Original languageEnglish (US)
Article number6462
JournalReview of Scientific Instruments
Volume91
Issue number7
DOIs
StatePublished - Jul 1 2020

All Science Journal Classification (ASJC) codes

  • Instrumentation

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    Gray, M. J., Kumar, N., O'Connor, R., Hoek, M., Sheridan, E., Doyle, M. C., Romanelli, M. L., Osterhoudt, G. B., Wang, Y., Plisson, V., Lei, S., Zhong, R., Rachmilowitz, B., Zhao, H., Kitadai, H., Shepard, S., Schoop, L. M., Gu, G. D., Zeljkovic, I., ... Burch, K. S. (2020). A cleanroom in a glovebox. Review of Scientific Instruments, 91(7), [6462]. https://doi.org/10.1063/5.0006462