A Calculation of the Electron Temperature of Complex Plasma of Noble Gases Mixture in CCRF Discharge

In this paper the results of studying of the electron temperature of buffer and complex plasmas in mixtures of noble gases (helium + argon) in capacitively coupled radiofrequency (CCRF) discharge are presented. The optical properties of dusty plasma in argon, helium and their mixtures have been studied using optical diagnostic methods. Based on spectral lines of plasma forming gases, the dependence of the electron temperature on gas pressure and discharge power has been determined. The axial distribution of electron temperature in the interelectrode gap has been measured. Measurements have been made using an RF compensated electric probe. The comparison of the experimental results shows that admixture of a small amount of argon to helium leads to a decrease in the electron temperature of buffer plasma. The presence of dust particles in the plasma causes an increase in the electron temperature.