3D vs. 2D analysis of FinFET logic gates under process variations

Sourindra Chaudhuri, Niraj K. Jha

Research output: Chapter in Book/Report/Conference proceedingConference contribution

23 Scopus citations


Among various multi-gate structures, FinFETs have emerged dominant owing to their ease of fabrication. Thus, characterization of FinFET devices/gates needs immediate attention for them to become the industry driver in this decade. Ideally, 3D device simulation should be done to enable accurate circuit synthesis. However, this is impractical due to the huge CPU times required. Simulating a 2D cross-section of the device yields 100-1000x reduction in CPU time. However, this introduces significant error, in the range of 10% to 50%, while evaluating the on/off current (I ON/I OFF) for a single device and leakage current or propagation delay (I LEAK/t D) for logic gates. In this work, we develop accurate 2D models of FinFET devices to capture 3D simulation accuracy with 2D simulation efficiency. We report results for the 22nm FinFET technology node. As far as we know, this is the first such attempt. We establish the validity of the model even under process variations. We target variations in gate length (L G), workfunction (Φ G) and fin thickness (TSI) that are known to have the most impact on leakage and delay. We adjust their values in the 2D model in order to mimic the actual 3D device behavior. When the 2D models are employed in mixed-mode simulation of FinFET logic gates, the error in the evaluation of I LEAK/t D is quite small.

Original languageEnglish (US)
Title of host publication2011 IEEE 29th International Conference on Computer Design, ICCD 2011
Number of pages2
StatePublished - 2011
Event29th IEEE International Conference on Computer Design 2011, ICCD 2011 - Amherst, MA, United States
Duration: Nov 9 2011Nov 12 2011

Publication series

NameProceedings - IEEE International Conference on Computer Design: VLSI in Computers and Processors
ISSN (Print)1063-6404


Other29th IEEE International Conference on Computer Design 2011, ICCD 2011
Country/TerritoryUnited States
CityAmherst, MA

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering


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