32 GHz metal-semiconductor-metal photodetectors on crystalline silicon

Stephen Y. Chou; Yue Liu; T. F. Carruthers

doi:10.1063/1.108418

32 GHz metal-semiconductor-metal photodetectors on crystalline silicon

Stephen Y. Chou, Yue Liu, T. F. Carruthers

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

Interdigitated metal-semiconductor-metal (MSM) photodetectors with 1.2 μm finger spacing and 0.8 μm finger width were fabricated on crystalline Si substrate. The devices are transit time limited, exhibiting a measured full width at half maximum response time of 14 ps and a 3-dB bandwidth of 32 GHz. Monte Carlo simulations of Si MSM photodetector response time and bandwidth agree with experiments and predict that if the finger spacing of the Si MSM photodetectors is reduced to 25 nm, the response time can decrease to ∼1 ps and the bandwidth can increase to 440 GHz.

Original language	English (US)
Pages (from-to)	1760-1762
Number of pages	3
Journal	Applied Physics Letters
Volume	61
Issue number	15
DOIs	https://doi.org/10.1063/1.108418
State	Published - 1992
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.108418

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title = "32 GHz metal-semiconductor-metal photodetectors on crystalline silicon",

abstract = "Interdigitated metal-semiconductor-metal (MSM) photodetectors with 1.2 μm finger spacing and 0.8 μm finger width were fabricated on crystalline Si substrate. The devices are transit time limited, exhibiting a measured full width at half maximum response time of 14 ps and a 3-dB bandwidth of 32 GHz. Monte Carlo simulations of Si MSM photodetector response time and bandwidth agree with experiments and predict that if the finger spacing of the Si MSM photodetectors is reduced to 25 nm, the response time can decrease to ∼1 ps and the bandwidth can increase to 440 GHz.",

author = "Chou, {Stephen Y.} and Yue Liu and Carruthers, {T. F.}",

year = "1992",

doi = "10.1063/1.108418",

language = "English (US)",

volume = "61",

pages = "1760--1762",

journal = "Applied Physics Letters",

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publisher = "American Institute of Physics",

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T1 - 32 GHz metal-semiconductor-metal photodetectors on crystalline silicon

AU - Chou, Stephen Y.

AU - Liu, Yue

AU - Carruthers, T. F.

PY - 1992

Y1 - 1992

N2 - Interdigitated metal-semiconductor-metal (MSM) photodetectors with 1.2 μm finger spacing and 0.8 μm finger width were fabricated on crystalline Si substrate. The devices are transit time limited, exhibiting a measured full width at half maximum response time of 14 ps and a 3-dB bandwidth of 32 GHz. Monte Carlo simulations of Si MSM photodetector response time and bandwidth agree with experiments and predict that if the finger spacing of the Si MSM photodetectors is reduced to 25 nm, the response time can decrease to ∼1 ps and the bandwidth can increase to 440 GHz.

AB - Interdigitated metal-semiconductor-metal (MSM) photodetectors with 1.2 μm finger spacing and 0.8 μm finger width were fabricated on crystalline Si substrate. The devices are transit time limited, exhibiting a measured full width at half maximum response time of 14 ps and a 3-dB bandwidth of 32 GHz. Monte Carlo simulations of Si MSM photodetector response time and bandwidth agree with experiments and predict that if the finger spacing of the Si MSM photodetectors is reduced to 25 nm, the response time can decrease to ∼1 ps and the bandwidth can increase to 440 GHz.

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DO - 10.1063/1.108418

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EP - 1762

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 15

ER -

32 GHz metal-semiconductor-metal photodetectors on crystalline silicon

Abstract

All Science Journal Classification (ASJC) codes

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