@inproceedings{5b6c729f7cd04c84bee107fef5a541aa,
title = "140 GHz MSM photodetectors in silicon-on-insulator",
abstract = "Due to serious limitations to Si detectors application brought about by wavelength dependence in response and slow speed at long wavelengths, high-speed metal-semiconductor-metal photodetectors (MSMPDs) in thin silicon-on-insulator (SOI) substrates have been fabricated. The detectors were fabricated on standard SIMOX SOI wafers.",
author = "Liu, {Mark Y.} and Erli Chen and Chou, {Stephen Y.}",
year = "1994",
language = "English (US)",
isbn = "0780319710",
series = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting",
publisher = "Publ by IEEE",
booktitle = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting",
note = "Proceedings of the Conference on Lasers and Electro-Optics ; Conference date: 08-05-1994 Through 13-05-1994",
}