140 GHz MSM photodetectors in silicon-on-insulator

Mark Y. Liu, Erli Chen, Stephen Y. Chou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Due to serious limitations to Si detectors application brought about by wavelength dependence in response and slow speed at long wavelengths, high-speed metal-semiconductor-metal photodetectors (MSMPDs) in thin silicon-on-insulator (SOI) substrates have been fabricated. The detectors were fabricated on standard SIMOX SOI wafers.

Original languageEnglish (US)
Title of host publicationConference Proceedings - Lasers and Electro-Optics Society Annual Meeting
PublisherPubl by IEEE
ISBN (Print)0780319710
StatePublished - Jan 1 1994
Externally publishedYes
EventProceedings of the Conference on Lasers and Electro-Optics - Anaheim, CA, USA
Duration: May 8 1994May 13 1994

Publication series

NameConference Proceedings - Lasers and Electro-Optics Society Annual Meeting
Volume8

Other

OtherProceedings of the Conference on Lasers and Electro-Optics
CityAnaheim, CA, USA
Period5/8/945/13/94

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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  • Cite this

    Liu, M. Y., Chen, E., & Chou, S. Y. (1994). 140 GHz MSM photodetectors in silicon-on-insulator. In Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting; Vol. 8). Publ by IEEE.