140-GHz metal-semiconductor-metal photodetectors on silicon-on-insulator substrate with a scaled active layer

Keyphrases

• Active Layer 100%
• Metal-semiconductor-metal Photodetector 100%
• Silicon-on-insulator 100%
• Insulator Substrate 100%
• Response Time 50%
• Device Structure 50%
• Electro-optic Sampling 50%
• Metal-semiconductor-metal 50%
• Finger Spacing 50%
• Finger Length 50%
• Dark Current 50%
• Semiconductor Substrate 50%
• Light Wavelength 50%
• Schottky Contact 50%
• Speed Independent 50%
• Light Penetration Depth 50%
• Detector Structures 50%

Material Science

• Silicon 100%
• Photosensor 100%
• Schottky Barrier 50%