100 nm period gratings produced by lithographically induced self-construction

Keyphrases

• Grating 100%
• Self-construction 100%
• Sub-100 Nm 100%
• Pattern Transfer 66%
• Pattern Formation 66%
• Thin Polymer Films 66%
• Transfer Techniques 66%
• Instability Process 66%
• Glass Transition Temperature 33%
• Polymer Film 33%
• Fabrication Methods 33%
• Physical Parameters 33%
• Polymer Layer 33%
• Lithography Process 33%
• Si Substrate 33%
• Nanostructures 33%
• Functional Devices 33%
• Scale Patterns 33%
• Etching Mask 33%
• Surface Patterning 33%
• Electrohydrodynamic Instability 33%
• Polymer Structure 33%
• Polymer Gratings 33%
• Molten Polymers 33%
• Pattern Masking 33%
• Industrial Applications 33%
• New Pattern 33%

Material Science

• Polymer Films 100%
• Polymer 100%
• Glass Transition Temperature 33%
• Linewidth 33%
• Lithography 33%
• Polymer Structure 33%
• Nanostructure 33%

Engineering

• Grating Period 100%
• Polymer 100%
• Pattern Transfer 28%
• Lithography 14%
• Physical Parameter 14%
• Industrial Applications 14%
• Si Substrate 14%
• Nanomaterial 14%