@inproceedings{0a623a649c26465087d60f6419f252a0,
title = "100 nm metallic checkerboard by wafer-scale nanoimprint and its application in surface enhanced Raman spectroscopy",
abstract = "A wafer-scale (\textasciitilde{}4 inch) 100 nm nano-checkerboard structure was fabricated. The fabrication combines multiple nanoimprint lithography, 3-D patterning and self-aligned etching. Transmission/reflection resonance at \textasciitilde{}750 nm and Raman enhancement of \textasciitilde{} 4.5x106 were achieved.",
author = "\{Wen-Di Li\}, Li and Chao Wang and Chou, \{Stephen Y.\}",
year = "2010",
language = "English (US)",
isbn = "9781557528896",
series = "Optics InfoBase Conference Papers",
booktitle = "Conference on Lasers and Electro-Optics, CLEO 2010",
note = "Conference on Lasers and Electro-Optics, CLEO 2010 ; Conference date: 16-05-2010 Through 21-05-2010",
}