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New Scalable Nanomanufacturing Technology: Large-Area Nanoimprint Master Fabrication without Using EBL by Innovative Multi-Set Nanopatterning
Chou, Stephen Y.
Electrical and Computer Engineering
Effective start/end date
NSF - National Science Foundation
Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
Engineering & Materials Science