Physics
Air Temperature
7%
Ambient Air
14%
Anisotropy
9%
Argon Plasma
8%
Aspect Ratio
11%
Asymmetry
5%
Atmospheric Cold Plasma
18%
Atmospheric Pressure
100%
Atmospherics
23%
Boundary Condition
5%
Charged Particle
5%
Cold Plasma
32%
Complex Plasma
9%
Continuity Equation
11%
Dielectrics
18%
Dissociation
7%
Distribution Function
23%
Electric Corona
7%
Electric Fields
21%
Electrical Properties
9%
Electromagnetic
14%
Electron Cyclotron Resonance
30%
Electron Density
24%
Electron Emission
7%
Electron Energy
71%
Electron Plasma
8%
Electrostatic Probe
16%
Electrostatics
17%
Energetics
20%
Energy Distribution
40%
Energy Transfer
7%
Feedback Control
7%
Finite Element Method
39%
Flow Velocity
15%
Fluence
18%
Fluorescence Spectroscopy
7%
Gas Discharges
17%
Gas Flow
32%
Gas Mixture
5%
Gas Pressure
16%
Gas Temperature
16%
Glow Discharge
64%
Ground State
13%
Ion Beams
8%
Ion Current
11%
Ionization Cross Sections
9%
Kinetic Energy
11%
Laser Induced Fluorescence
19%
Light Emission
25%
Light Scattering
11%
Machine Learning
9%
Mass Spectrometer
9%
Mass Spectroscopy
5%
Methane
5%
Microparticles
9%
Molecular Dynamics
55%
Molecular Dynamics Study
6%
Molecular Gas
18%
Monte Carlo Simulation
11%
Negative Ion
13%
Neutral Gas
38%
Nitrogen Oxide
14%
Nonequilibrium plasmas
9%
Optical Emission Spectroscopy
9%
Parallel Plate
28%
Physics
16%
Plasma Density
44%
Plasma Dynamics
7%
Plasma Etching
30%
Plasma Jet
40%
Plasma Potential
22%
Plasma Process
32%
Plasma Sheaths
14%
Plasma System
9%
Poisson Equation
18%
Positive Ion
20%
Potential Energy
7%
Potential Temperature
5%
Predictive Control Model
10%
Radio Frequency Discharge
26%
Rare Gas
18%
Reacting Flow
7%
Spatial Distribution
7%
Spherical Coordinate
14%
Steady State
26%
Surface Reaction
15%
Surface Roughness
17%
Therapy
14%
Thermophoresis
7%
Thin Films
5%
Transients
8%
Transport Theory
9%
Vapor Phase
16%
Engineering
Applied Voltage
7%
Atmospheric Aerosol
7%
Atmospheric Pressure
78%
Axisymmetric
10%
Beam Model
7%
Beam System
8%
Biomedical Application
8%
Biomolecule
10%
Bombardment
9%
Capacitive
9%
Chemical Vapor Deposition
7%
Cluster Size
7%
Computer Simulation
72%
Control Strategy
10%
Coupled Model
6%
Cross Section
6%
Dielectrics
36%
Direct Current
8%
Discharge Mode
10%
Disinfection
16%
Electric Field
14%
Electron Energy
16%
Energetics
7%
Energy Conservation
12%
Energy Distribution
14%
Energy Efficiency
12%
Energy Engineering
38%
Energy Function
9%
Experimental Measurement
19%
Experimental Observation
8%
Experimental Result
11%
Feedback Control System
7%
Finite Element Method
16%
Fluid Model
26%
Fluid Simulation
7%
Fourier Transform
13%
Gas Flow
11%
Gas Flowrate
6%
Gas Plasma
13%
Gas-Phase
13%
Generated Plasma
23%
Global Warming
7%
Glow Discharge
34%
Good Agreement
12%
Ground State
10%
Incident Angle
12%
Incident Energy
8%
Induced Damage
6%
Inductively Coupled Plasma
44%
Input Power
9%
Interelectrode Gap
12%
Interferogram
9%
Ion Energy
13%
Ion Implantation
14%
Light Emission
6%
Low-Temperature
7%
Mass Balance
6%
Microplasmas
9%
Model Prediction
17%
Molecular Weight
7%
Monolayer
13%
Nonequilibrium
6%
Number Density
8%
Oxygen Specie
6%
Phenomenological Model
6%
Photoresist
20%
Planarization
9%
Plasma Applications
13%
Plasma Damage
9%
Plasma Density
16%
Plasma Medicine
14%
Plasma Reactor
9%
Plasma Technology
8%
Plasma Treatment
37%
Polysilicon
7%
Potential Energy
9%
Powered Electrode
8%
Predictive Control
7%
Predictive Control Model
12%
Pressure Plasma
48%
Pulsed Laser
7%
Radio Frequency
11%
Reacting Flow
7%
Secondary Electrons
7%
Shaped Ring
6%
Si Surface
7%
Side Wall
7%
Silicon Surface
18%
Simulation Result
15%
Spherical Coordinate
9%
Stainless Steel
16%
Substrate Temperature
10%
Surface Feature
7%
Surface Layer
10%
Surface Region
8%
Temperature Plasma
6%
Thermophoresis
7%
Transients
11%
Two Dimensional
27%
Vapor Deposition
7%
Keyphrases
Ambient Air Plasma
11%
Applied Voltage
9%
Argon Ions
13%
Atomic Layer Etching
10%
Balance Model
9%
Chlorine
6%
Chlorine Gas
8%
Developing World
9%
Disordered Regions
7%
Dynamic Force
5%
Electron Cyclotron Resonance
9%
Electron Heating
5%
Etching Rate
5%
F Atoms
10%
Feature Evolution
9%
Fluid Model
9%
Fluorocarbon Film
9%
Force Field
9%
Gas Flow
9%
Helium
5%
Inductively Coupled Plasma
14%
Ion Bombardment
10%
Ion Energy
6%
Ion Impact
5%
Ion-assisted Etching
6%
Ion-induced Damage
10%
Loss Coefficient
6%
Low Pressure
6%
Low Pressure Discharge
9%
Molecular Dynamics
12%
Molecular Dynamics Simulation
70%
Neutral Species
9%
Neutral Transport
6%
O2 Plasma
6%
Optical Emission Spectroscopy
7%
Parallel Electrode
7%
Particle-in-cell Simulation
7%
Perfluorinated Compounds
9%
Phenomenological Models
5%
Photoresist
12%
Physical Sputtering
7%
Plasma Etching
9%
Plasma Etching Process
5%
Plasma Medicine
9%
Plasma Needle
9%
Plasma Process
14%
Plasma Processing
14%
Plasma Simulation
10%
Plasma-surface Interaction
5%
Radio-frequency Discharge
7%
Reacting Flow
9%
Reactive Ion Etching
9%
Reactive Neutrals
5%
Reactive Nitrogen Species
7%
Reactive Oxygen Species
7%
RF Glow Discharge
14%
RF Plasma
9%
Ring-like Structures
7%
Sheath Structure
9%
Silica
6%
Silicon Etching
9%
Silicon Surface
11%
Spontaneous Etching
10%
Sputtering Yield
7%
Stainless Steel
6%
Steady State
8%
Surface Chemistry
9%
Surface Micro-discharge
6%
Surface Roughening
7%
Sustainable Water
9%
Two-dimensional Axisymmetric Model
5%
Water Disinfection
11%
