The Micro/Nano Fabrication Laboratory (MNFL) consists of class 100-1000 clean room space providing a variety of material deposition, wet chemical and dry etch pattern transfer processes in conjunction with photo and electron beam lithography and metrology capabilities, for use in fabricating devices and structures for electronics, photonics, micro-electro mechanical systems (MEMS) and biological applications. The MNFL also has a companion packaging lab which provides capabilities—including wafer dicing, wire bonding, and substrate lapping and polishing—commonly associated with meeting back-end processing needs.
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